Semiconductor device, electronic device, electronic apparatus, and method of manufacturing semiconductor device

ABSTRACT

A semiconductor device includes a first semiconductor package, in which a first semiconductor chip is mounted and a second semiconductor package, in which a second semiconductor chip is mounted and which is supported above the first semiconductor package so as to extend off the first semiconductor package.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device, an electronicdevice, an electronic apparatus, a method of manufacturing asemiconductor device, and particularly to those suitable for beingapplied to a stacked structure of semiconductor packages or the like.

2. Description of Related Art

In a conventional semiconductor device, in order to save space whenmounting semiconductor chips, there has been a method of stackingsemiconductor chips, which are mounted on the same sized carriersubstrates.

However, in the method of stacking semiconductor chips mounted on thesame sized carrier substrates, a problem exists in that the number ofstacked carrier substrates increases and the total thickness of thestacked structure increases as the number of chips increases. Thus, thepresent invention is intended to provide a semiconductor device, anelectronic device, an electronic apparatus, and a method ofmanufacturing the semiconductor device, which can realize a stackedstructure of semiconductor packages while suppressing an increase in thethickness of the stacked structure.

SUMMARY OF THE INVENTION

In order to solve the above described problem, a semiconductor deviceaccording to an embodiment of the present invention includes a firstsemiconductor package, in which a first semiconductor chip is mounted,and a second semiconductor package, in which a second chip is mountedand which is supported above the first semiconductor package so as toextend off the first semiconductor package.

Accordingly, the second semiconductor package, which is larger in sizethan the first semiconductor package, can be stacked above the firstsemiconductor package. For this reason, while suppressing an increase inthe mounting region of the first semiconductor package, the number ofchips mounted above the first semiconductor package can be increased,and a space-savings can be attained when mounting the semiconductorchips.

Furthermore, in a semiconductor device according to an embodiment of thepresent invention, a plurality of the second semiconductor chips aremounted in the second semiconductor package. Accordingly, a plurality ofthe second semiconductor chips can be aligned for arrangement above thefirst semiconductor package without increasing the size of the firstsemiconductor package. For this reason, even when mounting a pluralityof semiconductor chips, an increase in the mounting region of the firstsemiconductor package can be suppressed while suppressing an increase inthe height, and a space-savings can be attained when mounting thesemiconductor chips.

Furthermore, a semiconductor device according to an embodiment of thepresent invention includes a first semiconductor package, in which afirst semiconductor chip is mounted, and a second semiconductor package,in which a second semiconductor chip is mounted and which is supportedabove the first semiconductor package so as to extend off the firstsemiconductor package. A third semiconductor package, in which a thirdsemiconductor chip is mounted and which is supported above the firstsemiconductor package so as to extend off the first semiconductorpackage is also provided.

Accordingly, a plurality of the second semiconductor packages, which arelarger in size than the first semiconductor package, can be stackedabove the first semiconductor package. For this reason, even when thechip sizes or types are different, the number of chips mounted above thefirst semiconductor package can be increased while suppressing anincrease in the height, and while enabling to realize various kinds offunctions, the space-savings can be attained when mounting thesemiconductor chips.

Furthermore, a semiconductor device according to an embodiment of thepresent invention includes a first semiconductor chip, and a firstsemiconductor package, in which a second semiconductor chip is mountedand which is mounted above the first semiconductor chip. Accordingly,the semiconductor package, which is larger in size than the firstsemiconductor chip, can be directly stacked above the firstsemiconductor chip. For this reason, while suppressing an increase inthe height, a plurality of the second semiconductor chips can be stackedabove the first semiconductor chip and an increase in the mountingregion when mounting the first semiconductor chip can be suppressed anda space-savings can be attained when mounting a plurality ofsemiconductor chips.

Furthermore, a semiconductor device according to an embodiment of thepresent invention includes a first carrier substrate, above which afirst semiconductor chip is mounted, a second semiconductor substrate,above which a second semiconductor chip is mounted, and a protrudingelectrode, which is bonded to the first carrier substrate and whichholds the second carrier substrate above the first semiconductor chip sothat the second carrier substrate extends off the first carriersubstrate.

Accordingly, the second carrier substrate, which is larger in size thanthe first carrier substrate, can be stacked above the first carriersubstrate so that the second carrier substrate is arranged above thefirst semiconductor chip. For this reason, while suppressing an increasein the mounting region of the first carrier substrate, the number ofchips mounted above the first semiconductor chip can be increased and aspace-savings can be attained when mounting the semiconductor chips.

Furthermore, a semiconductor device according to an embodiment of thepresent invention includes a first carrier substrate, above which afirst semiconductor chip is mounted, a second carrier substrate, abovewhich a second semiconductor chip is mounted, a third carrier substrate,above which a third semiconductor chip is mounted and a first protrudingelectrode, which is bonded to the first carrier substrate and whichholds the second carrier substrate above the first semiconductor chip sothat the second carrier substrate extends off the first carriersubstrate. A second protruding electrode is provided, which is bonded tothe first carrier substrate and which holds the third carrier substrateabove the first semiconductor chip so that the third carrier substrateextends off the first carrier substrate.

Accordingly, a plurality of carrier substrates, which are larger in sizethan the first carrier substrate, can be stacked above the firstsemiconductor chip so that a plurality of the carrier substrates arearranged above the first semiconductor chip. For this reason, even whenthe chip sizes or types are different, the number of chips arrangedabove the first semiconductor chip can be increased while suppressing anincrease in the height, and while enabling to realize various kinds offunctions. Also, a space-savings can be attained when mounting thesemiconductor chips.

Furthermore, a semiconductor device according to an embodiment of thepresent invention includes a first carrier substrate, above which afirst semiconductor chip is mounted, a second semiconductor chip, inwhich a re-routing wiring layer is formed via a stress relieving layer,and a protruding electrode, which is coupled to the re-routing wiringlayer and which holds the second semiconductor chip above the firstcarrier substrate so that the second semiconductor chip extends off thefirst carrier substrate.

Accordingly, the number of chips, which can be mounted above the firstcarrier substrate, can be increased while suppressing an increase in thesize of the first carrier substrate. As such, it is unnecessary tointerpose a carrier substrate between the first semiconductor chip andthe second semiconductor chip even when the second semiconductor chip isarranged above the first semiconductor chip. For this reason, even whena plurality of semiconductor chips are mounted, an increase in themounting region of the first carrier substrate can be suppressed whilesuppressing an increase in the height, and a space-savings can beattained when mounting the semiconductor chips.

Furthermore, a semiconductor device according to an embodiment of thepresent invention includes a first carrier substrate, above which afirst semiconductor chip is mounted, and a second semiconductor chip,which is mounted on the first carrier substrate so as to extend off thefirst carrier substrate. Accordingly, the number of chips, which can bemounted above the first carrier substrate, can be increased withoutstacking the second semiconductor chips mutually. For this reason, evenwhen the number of semiconductor chips to be mounted is increased, anincrease in the mounting region of the first carrier substrate can besuppressed while suppressing an increase in the height, andspace-savings can be attained when mounting the semiconductor chips.

Furthermore, a semiconductor device according to an embodiment of thepresent invention includes a first semiconductor chip, in which athrough-hole electrode is formed, a first carrier substrate, above whicha second semiconductor chip is mounted, and a coupling terminal, whichcouples the through-hole electrode to the first carrier substrate so asto arrange the first carrier substrate above the first semiconductorchip. Accordingly, the first carrier substrate, which is larger in sizethan the first semiconductor chip, can be directly stacked above thefirst semiconductor chip. For this reason, a plurality of the secondsemiconductor chips can be stacked above the first semiconductor chipwhile suppressing an increase in the height, an increase in the mountingregion when mounting the first semiconductor chip can be suppressed, anda space-savings can be attained when mounting a plurality ofsemiconductor chips.

Furthermore, an electronic device according to an embodiment of thepresent invention includes a first package, in which a first electroniccomponent is mounted, and a second package, in which a second electroniccomponent is mounted and which is supported above the first package soas to extend off the first package. Accordingly, the second package,which is larger in size than the first package, can be stacked above thefirst package. For this reason, the number of components, which aremounted on the first package, can be increased while suppressing anincrease in the mounting region of the first package, and thespace-saving can be attained when mounting electronic components.

Furthermore, an electronic apparatus according to an embodiment of thepresent invention includes a first semiconductor package, in which afirst semiconductor chip is mounted, a second semiconductor package, inwhich a second semiconductor chip is mounted and which is supportedabove the first semiconductor package so as to extend off the firstsemiconductor package, a mother substrate, above which the firstsemiconductor package is mounted, and an electronic component, which iscoupled to the first semiconductor chip and the second semiconductorchip via the mother substrate.

Accordingly, a three-dimensional mounting structure of a semiconductorpackage can be realized while enabling to suppress an increase in theheight, and the weight savings and the miniaturization of an electronicapparatus can be attained, while enabling to improve the functionalityof the electronic apparatus. Furthermore, a method of manufacturingsemiconductor device according to an embodiment of the present inventionincludes mounting a first semiconductor chip above a first carriersubstrate, mounting a second semiconductor chip above a second carriersubstrate, forming a protruding electrode on the second carriersubstrate and bonding the protruding electrode on the first carriersubstrate so that the second carrier substrate extends off the firstcarrier substrate.

Accordingly, even when the second carrier substrate is larger in sizethan the first carrier substrate, the second carrier substrate can bestacked above the first carrier substrate, above which the firstsemiconductor chip is mounted, by bonding the protruding electrode tothe first carrier substrate, and an increase in the height of thestacked structure of the semiconductor packages can be suppressed whilesuppressing complications in the manufacturing process.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a sectional view showing a schematic structure of asemiconductor device according to a first embodiment of the presentinvention.

FIG. 2 is a plan view showing a method of arranging protrudingelectrodes according to a second embodiment of the present invention.

FIG. 3 is a sectional view showing a schematic structure of asemiconductor device according to a third embodiment of the presentinvention.

FIG. 4 is a sectional view showing a schematic structure of asemiconductor device according to a fourth embodiment of the presentinvention.

FIG. 5 is a sectional view showing a schematic structure of asemiconductor device according to a fifth embodiment of the presentinvention.

FIG. 6 is a plan view showing a method of arranging protrudingelectrodes according to a sixth embodiment of the present invention.

FIG. 7 is a sectional view showing a schematic structure of asemiconductor device according to a seventh embodiment of the presentinvention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Hereinafter, semiconductor devices according to embodiments of thepresent invention will be described by referring to the drawings. FIG. 1is a sectional view showing a schematic structure of a semiconductordevice according to a first embodiment of the present invention.

In FIG. 1, a semiconductor package PK1 has a carrier substrate 11provided therein, lands 12 a and 12 c are formed on both sides of thecarrier substrate 11, and internal wiring 12 b is formed inside thecarrier substrate 11. Then, a semiconductor chip 13 is flip-chip mountedabove the carrier substrate 11, and a protruding electrode 14 forflip-chip mounting is formed on the semiconductor chip 13. Then, theprotruding electrode 14, formed on the semiconductor chip 13, is bondedto the land 12 c by Anisotropic Conductive Film (ACF) bonding via ananisotropic conductive film 15. Moreover, on the land 12 a formed on theback surface of the carrier substrate 11, a protruding electrode 16 formounting the carrier substrate 11 above a motherboard is formed.

On the other hand, the semiconductor package PK2 has a carrier substrate21 provided therein, lands 22 a and 22 c are formed on both sides of thecarrier substrate 21, and an internal wiring 22 b is formed inside thecarrier substrate 21. Then, a plurality of the semiconductor chips 23 aand 23 c are flip-chip mounted above the carrier substrate 21, andprotruding electrodes 25 a and 25 c for flip-chip mounting are formed onthe semiconductor chips 23 a and 23 c respectively. Then, the protrudingelectrodes 25 a and 25 c, formed on the semiconductor chips 23 a and 23c respectively, are bonded to the land 22 c by ACF bonding viaanisotropic conductive films 24 a and 24 c respectively. Furthermore,above the semiconductor chips 23 a and 23 c, the semiconductor chips 23b and 23 d are face-up mounted respectively, and the semiconductor chips23 b and 23 d are fixed above the semiconductor chips 23 a and 23 c viaadhesion layers 24 b and 24 d respectively, while being wire-bonded tothe land 22 c via conductive wirings 25 b and 25 d respectively. Inaddition, the semiconductor package PK2 may be of a stacked structureusing only the wire bonding, as well as a stacked structure using bothof the flip-chip and wire bonding.

Moreover, a sealing resin 27 is provided over the entire surface of thecarrier substrate 21, which is the mounting side of the semiconductorchips 23 a through 23 d, and thus the semiconductor chips 23 a through23 d are sealed by the sealing resin 27. In addition, when sealing thesemiconductor chips 23 a through 23 d by the sealing resin 27, a moldingusing a thermosetting resin such as an epoxy resin can be conducted, forexample.

Furthermore, on the land 22 a formed on the back surface of the carriersubstrate 21, a protruding electrode 26 for mounting the carriersubstrate 21 above the carrier substrate 11 is formed so that thecarrier substrate 21 is held above the semiconductor chip 13. Theprotruding electrode 26 is arranged, while avoiding the mounting regionof the semiconductor chip 13, for example, the protruding electrode 26can be arranged on the periphery of the back surface of the carriersubstrate 21. And, by bonding the protruding electrode 26 to the land 12c formed on the carrier substrate 11, the carrier substrate 21,ismounted above the carrier substrate 11 so as to arrange the carriersubstrate 21 above the semiconductor chip 13.

The size of the carrier substrate 21 can be made larger than that of thecarrier substrate 11. And, when the carrier substrate 21 is mountedabove the carrier substrate 11, the carrier substrate 21 can be arrangedabove the carrier substrate 11 so that at least one end of the carriersubstrate 21 extends off laterally. Accordingly, the semiconductorpackage PK2 or the like having a larger size than the semiconductorpackage PK1 can be stacked above the semiconductor package PK1. Evenwhen the semiconductor chips 23 a through 23 d are mounted above thesemiconductor package PK1, it is unnecessary to stack the semiconductorchips 23 c and 23 d above the semiconductor chips 23 a and 23 b. Forthis reason, while suppressing an increase in the mounting region of thesemiconductor package PK1, an increase in the height of thesemiconductor package PK2 can be suppressed, and a space-savings can beattained when mounting the semiconductor chips 13 and 23 a through 23 d.

In addition, when the carrier substrate 21 is mounted above the carriersubstrate 11, the back surface of the carrier substrate 21 may makecontact with the semiconductor chip 13, or the back surface of thecarrier substrate 21 may be apart from the semiconductor chip 13.Moreover, as for the protruding electrodes 16 and 26, a solder ball canbe used, for example. For this reason, the packages PK1 and PK2, havingdifferent sizes, can be stacked mutually by using a general ball gridarray (BGA) method, thereby the production lines can be commonly used.

In addition, as for the carrier substrates 11 and 21, for example, adouble-sided substrate, a multilayer-interconnection substrate, abuild-up substrate, a tape substrate, or a film substrate or the likecan be used, and as for the material of the carrier substrates 11 and21, for example, a polyimide resin, a glass epoxy resin, a BT resin, acomposite of aramid and epoxy, a ceramic or the like can be used.Moreover, as for the protruding electrodes 14, 16 and 26, for example,an Au bump, a Cu bump or a Ni bump covered with a solder material or thelike, as well as a solder ball can be used. As for the conductivewirings 25 b and 25 d, for example, an Au wire, an Al wire or the likecan be used. Moreover, in order to mount the carrier substrate 21 abovethe carrier substrate 11, a method of forming the protruding electrode26 on the land 22 a of the carrier substrate 21 has been described,however, the protruding electrode 26 may be formed on the land 12 c ofthe carrier substrate 11.

Moreover, in the above described embodiment, a method of mounting thesemiconductor chip 13 above the carrier substrate 11 by ACF bonding hasbeen described, however, other weld bonding such as Nonconductive Film(NCF) bonding, Anisotropic Conductive Paste (ACP) bonding andNonconductive Paste (NCP) bonding may be used, for example, and metalbonding such as solder bonding and alloy bonding may be used.Furthermore, in the above described embodiment, a method of mountingonly one semiconductor chip 13 above the carrier substrate 11 has beendescribed as an example. However, a plurality of semiconductor chips maybe mounted above the carrier substrate 11. In addition, resin may befilled into the gap between the carrier substrate 11 and the carriersubstrate 21, as required.

Moreover, in the above described embodiment, a stacked structure, inwhich the semiconductor package PK2 extends off both sides of thesemiconductor package PK1 has been described, however, the semiconductorpackage PK2 may extend off one side of the semiconductor package PK1.Moreover, the semiconductor package PK2 may extend off two directions ofthe right/left and the front/rear of the semiconductor package PK1, orthe semiconductor package PK2 may extend off only one direction of theright/left or the front/rear of the semiconductor package PK1.

Moreover, in the above described embodiment, as for the semiconductorpackage PK1, a flip-chip mounted structure has been described as anexample. However, a molded structure may be used. Moreover, thesemiconductor package PK2 may be of a single layer structure of asemiconductor chip as well as a stacked structure of semiconductorchips, and may be of a flip-chip structure as well as a moldedstructure. FIG. 2 is a sectional view showing a schematic structure of asemiconductor device according to a second embodiment of the presentinvention.

In FIG. 2, a semiconductor package PK11 has a carrier substrate 31provided therein, lands 32 a and 32 c are formed on both sides of thecarrier substrate 31, and an internal wiring 32 b is formed in thecarrier substrate 31. Then, a semiconductor chip 33 is flip-chip mountedon the carrier substrate 31, and a protruding electrode 34 for flip-chipmounting is formed on the semiconductor chip 33. Then, the protrudingelectrode 34, formed on the semiconductor chip 33, is bonded to the land32 c by ACF bonding via an anisotropic conductive film 35. Moreover, onthe land 32 a formed on the back surface of the carrier substrate 31, aprotruding electrode 36 for mounting the carrier substrate 31 above amother substrate is formed.

On the other hand, the semiconductor packages PK12 and PK13 have carriersubstrates 41 and 51 provided therein, respectively. Then, lands 42 aand 52 a are formed respectively on the back surfaces of the carriersubstrates 41 and 51, lands 42 c and 52 c are formed respectively on thefront surfaces of the carrier substrates 41 and 51, and internal wirings42 b and 52 b are formed respectively in the carrier substrates 41 and51.

Then, above the carrier substrates 41 and 51, semiconductor chips 43 aand 53 a are face-up mounted via adhesion layers 44 a and 54 a,respectively, and the semiconductor chips 43 a and 53 a are wire-bondedto lands 42 c and 52 c via conductive wirings 45 a and 55 a,respectively. Furthermore, above the semiconductor chips 43 a and 53 a,semiconductor chips 43 b and 53 b are face-up mounted, respectively,while avoiding the conductive wirings 45 a and 55 a, and thesemiconductor chips 43 b and 53 b are fixed above the semiconductorchips 43 a and 53 a via adhesion layers 44 b and 54 b, respectively,while being wire-bonded to the lands 42 c and 52 c via conductivewirings 45 b and 55 b, respectively. Furthermore, above thesemiconductor chips 43 b and 53 b, semiconductor chips 43 c and 53 c areface-up mounted, respectively, while avoiding the conductive wirings 45b and 55 b, and the semiconductor chips 43 c and 53 c are fixed abovethe semiconductor chips 43 b and 53 b via adhesion layers 44 c and 54 c,respectively, while being wire-bonded to the lands 42 c and 52 c viaconductive wirings 45 c and 55 c respectively.

Moreover, sealing resin 47 and 57 are respectively provided over theentire surfaces of the carrier substrates 41 and 51, which are themounting sides of the semiconductor chips 43 a through 43 c and 53 athrough 53 c, and the semiconductor chips 43 a through 43 c and 53 athrough 53 c are sealed by the sealing resin 47 and 57, respectively. Inaddition, when sealing the semiconductor chips 43 a through 43 c and 53a through 53 c by the sealing resin 47 and 57, respectively, a moldingusing a thermosetting resin such as an epoxy resin can be conducted.

Moreover, on the lands 42 a and 52 a, formed on the back surfaces of thecarrier substrates 41 and 51, respectively, protruding electrodes 46 and56 for mounting the respective carrier substrates 41 and 51 above thecarrier substrate 31 are formed so that the carrier substrates 41 and 51are held above the semiconductor chip 33. By bonding the protrudingelectrodes 46 and 56 to the land 32 c formed on the carrier substrate31, the carrier substrates 41 and 51 can be mounted above the carriersubstrate 31 so that the ends of the carrier substrates 41 and 51 arearranged above the semiconductor chip 33.

When mounting the carrier substrates 41 and 51 above the carriersubstrate 31, the carrier substrates 41 and 51 can be arranged above thecarrier substrate 31 so that at least one end of the carrier substrates41 and 51 extend off laterally. Accordingly, a plurality of thesemiconductor packages PK12 and PK13 can be aligned for arrangementabove the semiconductor package PK11 without increasing the size of thesemiconductor package PK11. For this reason, even when the chip sizesand types are different, the number of chips, which are mounted abovethe semiconductor package PK11, can be increased while suppressing anincrease in the height, and while enabling to realize various functions.A space-savings can be attained when mounting the semiconductor chips33, 43 a through 43 c and 53 a through 53 c.

In addition, in the above described embodiment, a method of mounting thetwo semiconductor packages PK12 and PK13 above the semiconductor packagePK11 has been described. However, three or more semiconductor packagesmay be mounted above the semiconductor package PK11. Moreover, aplurality of semiconductor packages, which are different in size ortype, may be mounted above the semiconductor package PK11.

FIG. 3 is a plan view showing a method of arranging protrudingelectrodes according to a third embodiment of the present invention. InFIG. 3, on carrier substrates 62 and 64, protruding electrodes 63 and 65are arranged in a U-shape, respectively, and regions, where theprotruding electrodes 63 and 65 are not arranged, are provided along atleast one side of the carrier substrates 62 and 64.

Then, the protruding electrodes 63 and 65, formed on the carriersubstrates 62 and 64 respectively, are bonded to a lower substrate,above which the semiconductor chip 61 is provided, so that the regions,where the protruding electrodes 63 and 65 are not formed, overlap abovethe semiconductor chip 61. Accordingly, even when the carrier substrates62 and 64 are mounted so that the ends of the carrier substrates 62 and64 are arranged above the semiconductor chip 61, the stability of thecarrier substrates 62 and 64 can be maintained, and while suppressingcomplication of the manufacturing process, a space-savings can beattained when mounting the semiconductor chips.

FIG. 4 is a sectional view showing a schematic structure of asemiconductor device according to a fourth embodiment of the presentinvention. In FIG. 4, a semiconductor package PK21 has a carriersubstrate 71 provided therein. Lands 72 a and 72 c are formed on bothsides of the carrier substrate 71, and an internal wiring 72 b is formedin the carrier substrate 71. Then, a semiconductor chip 73 is flip-chipmounted above the carrier substrate 71, and a protruding electrode 74for flip-chip mounting is formed on the semiconductor chip 73. Then, theprotruding electrode 74, formed on the semiconductor chip 73, is bondedto the land 72 c by ACF bonding via an anisotropic conductive film 75.Moreover, on the land 72 a formed on the back surface of the carriersubstrate 71, a protruding electrode 76 for mounting the carriersubstrate 71 above a mother substrate is formed.

On the other hand, semiconductor packages PK22 and PK23 havesemiconductor chips 81 and 91 provided therein, respectively, and oneach of the semiconductor chips 81 and 91, electrode pads 82 and 92 areformed, respectively, and insulating layers 83 and 93 are formed,respectively, so that each of the electrode pads 82 and 92 is exposed.Then, on each of the semiconductor chips 81 and 91, stress relievinglayers 84 and 95 are formed, respectively, so as to expose each of theelectrode pads 82 and 92. On each of the electrode pad 82 and 92,re-routing wirings 85 and 95, which are extended on the stress relievinglayers 84 and 94, respectively, are formed, respectively. Then, on eachof the re-routing wirings 85 and 95, solder-resist layers 86 and 96 areformed, respectively, and on each of the solder-resist layers 86 and 96,opening portions 87 and 97, which expose the re-routing wirings 85 and95 on each of the stress relieving layers 84 and 95, respectively, areformed. Then, on the re-routing wirings 85 and 95, exposed through eachof the opening portions 87 and 97, respectively, protruding electrodes88 and 98 for face-down mounting the respective semiconductor chips 81and 91 above the carrier substrate 71 are formed so as to hold the endsof the semiconductor chips 81 and 91 above the semiconductor chip 73.

The protruding electrodes 88 and 98 can be arranged, while avoiding themounting region of the semiconductor chip 73. For example, theprotruding electrodes 88 and 98 can be arranged in a U-shape. Then, bybonding the protruding electrodes 88 and 98 on the land 72c, formed onthe carrier substrate 71, and arranging the ends of the semiconductorchips 81 and 91 above the semiconductor chip 73, the semiconductorpackages PK22 and PK23 are mounted above the semiconductor package PK21.

When the semiconductor chips 81 and 91 are mounted above the carriersubstrate 71, the semiconductor chips 81 and 91 can be arranged abovethe carrier substrate 71 so that at least one end of each of thesemiconductor chips 81 and 91 extends off laterally. Accordingly, aplurality of Wafer level-chip size package (W-CPS)s can be aligned forarrangement above the carrier substrate 71, above which thesemiconductor chip 73 is flip-chip mounted, and the number of chips,which can be mounted above the carrier substrate 71, can be increased,while suppressing an increase in the size of the carrier substrate 71.Even when the semiconductor chips 81 and 91 are arranged above thesemiconductor chip 73, it is unnecessary to interpose a carriersubstrate between the semiconductor chip 73 and the semiconductor chips81 and 91. For this reason, even when a plurality of the semiconductorchips 73, 81 and 91 are mounted above the carrier substrate 71, anincrease in the mounting region of the carrier substrate 71 can besuppressed while suppressing an increase in the height, and aspace-savings can be attained when mounting the semiconductor chips 73,81 and 91.

Moreover, as for the protruding electrodes 74, 88 and 98, for example,an Au bump, a Cu bump or a Ni bump covered with a solder material or thelike, as well as a solder ball can be used. In addition, in the abovedescribed embodiment, a method of mounting two semiconductor chips 81and 91 above the semiconductor package PK21 has been described. However,three or more semiconductor chips may be mounted above the semiconductorpackage PK21. Moreover, a plurality of semiconductor packages, which aredifferent in function or size, may be mounted above the semiconductorpackage PK21.

Moreover, in the above described embodiment, the semiconductor packagesPK22 and PK23 using wafer level chip size packages have been describedas an example. However, the semiconductor package may use, for example,other chip size packages such as a Tape level-chip size package (T-CSP),or a BGA in addition to the wafer level-chip size package.

FIG. 5 is a sectional view showing a schematic structure of asemiconductor device according to a fifth embodiment of the presentinvention. In FIG. 5, a semiconductor package PK31 has a carriersubstrate 101 provided therein. Lands 102 a and 102 c are formed on bothsides of the carrier substrate 101, and an internal wiring 102 b isformed in the carrier substrate 101. Then, a semiconductor chip 103 isflip-chip mounted above the carrier substrate 101, and a protrudingelectrode 104 for flip-chip mounting is formed on the semiconductor chip103. Then, the protruding electrode 104, formed on the semiconductorchip 103, is bonded to the land 102 c by ACF bonding via an anisotropicconductive film 105. Moreover, on the land 102 a formed on the backsurface of the carrier substrate 101, a protruding electrode 106 formounting the carrier substrate 101 above a mother substrate is formed.

On the other hand, on the semiconductor chips 111 and 121, protrudingelectrodes 112 and 122 for flip-chip mounting the respectivesemiconductor chips 111 and 121 are formed. The protruding electrodes112 and 122 can be arranged so as to locationally deviate to one side ofthe semiconductor chips 111 and 121. For example, the protrudingelectrodes 112 and 122 can be arranged in an L-shape or a U-shape. Then,the protruding electrodes 112 and 122, formed on the respectivesemiconductor chips 111 and 121, can be bonded to the land 102 c by ACFbonding via anisotropic conductive films 113 and 123 respectively.

When the semiconductor chips 11j and 121 are mounted above the carriersubstrate 101, the semiconductor chips 111 and 121 can be arranged abovethe carrier substrate 101 so that at least one end of each of thesemiconductor chips 111 and 121 extends off laterally. Accordingly, aplurality of the semiconductor chips 111 and 121 can be aligned forarrangement above the carrier substrate 101, above which thesemiconductor chip 103 is flip-chip mounted, and the number of chips,which can be mounted above the carrier substrate 101, can be increased,while suppressing an increase in the size of the carrier substrate 101.Even when the semiconductor chips 111 and 121 are arranged above thecarrier substrate 101, it is unnecessary to interpose a carriersubstrate between the semiconductor chip 103 and semiconductor chips 111and 121. For this reason, even when a plurality of the semiconductorchips 103, 111 and 121 are mounted above the carrier substrate 101, anincrease in the mounting region of the carrier substrate 101 can besuppressed while suppressing an increase in the height, and aspace-savings can be attained when mounting the semiconductor chips 103,111 and 121.

Moreover, as for the protruding electrodes 104, 112 and 122, forexample, an Au bump, a Cu bump or a Ni bump covered with a soldermaterial or the like, as well as a solder ball can be used. In addition,in the above described embodiment, a method of mounting threesemiconductor chips 103, 111 and 121 above the carrier substrate 101 hasbeen described. However, three or more semiconductor chips may bemounted above the carrier substrate 101. Moreover, a plurality ofsemiconductor packages, which are different in function or size, may bemounted above the carrier substrate 101.

Moreover, in the above described embodiment, a method of mounting thesemiconductor chips 103, 111 and 121 above the carrier substrate 101 byACF bonding has been described. However, other weld bondings such as NCFbonding, ACP bonding and NCP bonding may be used, for example, and metalbondings such as solder bonding and alloy bonding may be used. Asemiconductor chip may be face-up mounted above the carrier substrate101 so that the semiconductor chip extends off the carrier substrate101, and the semiconductor chip, which is face-up mounted, may bewire-bonded.

FIG. 6 is a plan view showing a method of arranging protrudingelectrodes according to a sixth embodiment of the present invention. InFIG. 6, on semiconductor chips 211, 221, 231 and 241, protrudingelectrodes 212, 222, 232 and 242 are respectively arranged in anL-shape, and the protruding electrodes 212, 222, 232 and 242 arearranged so as to locationally deviate on one end of each of thesemiconductor chips 211, 221, 231 and 241, respectively. In addition,above a carrier substrate 201, a semiconductor chip 202 is face-downmounted.

Then, by bonding the protruding electrodes 212, 222, 232 and 242, formedon the respective semiconductor chips 211, 221, 231 and 241, to thecarrier substrate 201, the respective semiconductor chips 211, 221, 231and 241 are mounted above the carrier substrate 201 so that therespective semiconductor chips 211, 221, 231 and 241 extend off thecarrier substrate 201.

Accordingly, even when the respective semiconductor chips 211, 221, 231and 241 are mounted above the carrier substrate 201 so that therespective semiconductor chips 211, 221, 231 and 241 extend off thecarrier substrate 201, the stability of the respective semiconductorchips 211, 221, 231 and 241 can be maintained, and while suppressingcomplications in the manufacturing process, a space-savings can beattained when mounting the semiconductor chips 201, 211, 221, 231 and241.

FIG. 7 is a sectional view showing a schematic structure of asemiconductor device according to a seventh embodiment of the presentinvention. In FIG. 7, a semiconductor package PK41 has a carriersubstrate 301 provided therein. Lands 302 a and 302 c are formed on bothsides of the carrier substrate 301, and an internal wiring 302 b isformed in the carrier substrate 301. Then, a semiconductor chip 303 isflip-chip mounted above the carrier substrate 301, and a protrudingelectrode 304 for flip-chip mounting is formed on the semiconductor chip303. Then, the protruding electrode 304, formed on the semiconductorchip 303, is bonded to the land 302 c by ACF bonding via an anisotropicconductive film 305. Moreover, on the land 302 a formed on the backsurface of the carrier substrate 301, a protruding electrode 306 formounting the carrier substrate 301 above a mother substrate is formed.

On the other hand, on semiconductor chips 311 a through 311 c, electrodepads 312 a through 312 c are formed, respectively, and insulating layers313 a through 313 c are formed, respectively, so that each of theelectrode pads 312 a through 312 c are exposed. Then, in thesemiconductor chips 311 a through 311 c, for example, through-holeportions 314 a through 314 c are formed corresponding to the respectivepositions of the electrode pads 312 a through 312 c. Inside thethrough-hole portions 314 a through 314 c, through-hole electrodes 317 athrough 317c are formed, respectively, via respective insulating layers315 a through 315 c and respective conductive films 316 a through 316 c.Then, the semiconductor chips 311 a through 311 c, in which thethrough-hole electrodes 317 a through 317 c are formed, respectively,are stacked via the through-hole electrodes 317 a through 317 c.

Moreover, on the through-hole electrode 317 a formed in thesemiconductor chip 311 a, a protruding electrode 319 for mounting thestacked structure of the semiconductor chips 311 a through 311 c above amotherboard is formed. Then, the protruding electrode 306 is bonded tothe through-hole electrode 317 c, formed in the semiconductor chip 311c, so that the carrier substrate 301 is held above the semiconductorchip 311 c.

When mounting the carrier substrate 301 above the semiconductor chip 311c, the carrier substrate 301 can be arranged above the semiconductorchip 311 c so that at least one end of the carrier substrate 301 extendsoff laterally. Accordingly, the carrier substrate 301, whose size islarger than those of the semiconductor chips 311 a through 311 c, can bedirectly stacked above the semiconductor chip 311 c. For this reason,the semiconductor chip 303, which is different in size or type, can bestacked above the semiconductor chips 311 a through 311 c whilesuppressing an increase in the height, an increase in the mountingregion when mounting the semiconductor chips 311 a through 311 c can besuppressed, and the space-saving can be attained when mounting aplurality of the semiconductor chips 301 and 311 a through 311 c, whichare different in size or type.

Moreover, when mounting the carrier substrate 301 above thesemiconductor chip 311 c, weld bondings such as ACF bonding, NCFbonding, ACP bonding and NCP bonding may be used, for example, and metalbondings such as solder bonding and alloy bonding may be used. Moreover,as for the protruding electrodes 304, 306 and 319, for example, an Aubump, a Cu bump or a Ni bump covered with a solder material or the like,as well as a solder ball may be used. Moreover, in the above describedembodiment, a method of mounting the carrier substrate 301 above athree-layer structure of the semiconductor chips 311 a through 311 c hasbeen described, however, a stacked structure of the semiconductor chips,above which the carrier substrate 301 is mounted, may be of one layer,two layers, or four layers or more.

Moreover, in the above described embodiments, methods of mountingsemiconductor chips or semiconductor packages have been described asexamples. However, the present invention is not necessarily limited tothe methods of mounting semiconductor chips or semiconductor packages,but a ceramic element such as a surface acoustic wave (SAW) element, anoptical element such as a light modulator and an optical switch, andvarious sensors such as a magnetic sensor and a bio-sensor may bemounted, for example.

In addition, the semiconductor devices and the electronic devicesdescribed above are applicable to an electronic apparatus such as aliquid crystal display device, a cellular phone, a Personal DigitalAssistant, a video camera, a digital camera, and a Mini Disc (MD)player, and thus enable to attain the weight savings and miniaturizationof an electronic apparatus, while enabling to improve the functionalityof the electronic apparatus.

1-2. (canceled)
 3. A semiconductor device, comprising: a firstsemiconductor package, in which a first semiconductor chip is mounted; asecond semiconductor package, in which a second semiconductor chip ismounted and which is supported above the first semiconductor package soas to extend off the first semiconductor package; and a thirdsemiconductor package, in which a third semiconductor chip is mountedand which is supported above the first semiconductor package so as toextend off the first semiconductor package.
 4. A semiconductor device,comprising: a first semiconductor chip; and a first semiconductorpackage, in which a second semiconductor chip is mounted and whichmounted above the first semiconductor chip.
 5. (canceled)
 6. Asemiconductor device, comprising: a first carrier substrate, above whicha first semiconductor chip is mounted; a second carrier substrate, abovewhich a second semiconductor chip is mounted; a third carrier substrate,above which a third semiconductor chip is mounted; a first protrudingelectrode, which is bonded to the first carrier substrate and whichholds the second carrier substrate above the first semiconductor chip sothat the second carrier substrate extends off the first carriersubstrate; and a second protruding electrode which is bonded to thefirst carrier substrate and which holds the third carrier substrateabove the first semiconductor chip so that the third carrier substrateextends off the first carrier substrate. 7-13. (canceled)
 14. Thesemiconductor device according to claim 6, further comprising landsprovided on both sides of the first and second carrier substrates. 15.(canceled)
 16. The semiconductor device according to claim 6, furthercomprising internal wirings formed inside the first and second carriersubstrates.
 17. (canceled)
 18. The semiconductor device according toclaim 6, wherein the first semiconductor chip is flip-flop mounted tothe first carrier substrate.
 19. (canceled)
 20. The semiconductor deviceaccording to claim 6, wherein the second semiconductor chip is flip-flopmounted to the second carrier substrate.